Film

Function

Formula

SiO2

ARC, Dielectric, Passivation

SiH4 + N2O

Si3N4

ARC, Dielectric, Passivation

SiH4 + NH3

SiNxOy

ARC

SiH4 + N2O + NH3

a-Si

Normal

SiH4 + H2

P, I & N layer

SiH4 + B2H6/PH3

uc-Si

Normal

SiH4 + H2 (with High Temp.)

P, I & N layer

SiH4 + B2H6/PH3

SiGe

Normal

SiH4 + GeH4

P, I & N layer

SiH4 + GeH4 + B2H6/PH3

SiC

Normal

SiH4 + CH4

P, I & N layer

SiH4 + CH4 + B2H6/PH3

Clean

Clean

CF4 + O2

Si Film Clean

CF4 + O2 + Ar