Brooks MFC 5850E
產品介紹/Products
商品名稱:
規格介紹:
Brooks 5850E
規格介紹:Brooks 5850E
Manufacturer : Brooks
Model : 5850E
Category : MFC
Body material : Aluminum, Stainless Steel
Sealing material : Viton, EPDM
Standard : +/-1.5%FS Hi-performance:+/-1% of reading
☆ Gas and flow can be adjusted within product specifications.
☆ For second-hand or new products, please contact us for consultation.
Other Model : 5866RT / 5964C4 / GF040C / 5851E
詳細介紹:
GAS | Flow | Connector | Fitting |
Ar | 50SCCM | D-sub 15(VGA) | VCR |
100SCCM | D-sub 15(VGA) | Swagelok/VCR | |
200SCCM | D-sub 15(VGA) | Swagelok/VCR | |
300SCCM | D-sub 15(VGA) | Swagelok/VCR | |
1000SCCM | D-sub 15(VGA) | Swagelok | |
1SLM | D-sub 15(VGA) | Swagelok | |
2SLM | D-sub 15(VGA) | Swagelok | |
3SLM | D-sub 15(VGA) | Swagelok | |
O2 | 10SCCM | D-sub 15(VGA) | Swagelok |
20SCCM | D-sub 15(VGA) | VCR | |
30SCCM | D-sub 15(VGA) | VCR | |
50SCCM | D-sub 15(VGA) | VCR | |
50SCCM | PCI-E | VCR | |
100SCCM | D-sub 15(VGA) | VCR | |
200SCCM | D-sub 15(VGA) | Swagelok/VCR | |
300SCCM | D-sub 15(VGA) | Swagelok/VCR | |
N2 | 20SCCM | D-sub 15(VGA) | VCR |
100SCCM | D-sub 15(VGA) | Swagelok | |
200SCCM | D-sub 15(VGA) | VCR | |
4000SCCM | D-sub 15(VGA) | Swagelok | |
50SLM | D-sub 15(VGA) | VCR | |
100SLM | PCI-E | VCR | |
BCL3 | 10SCCM | D-sub 15(VGA) | VCR |
50SCCM | D-sub 15(VGA) | VCR | |
200SCCM | D-sub 15(VGA) | VCR | |
CL2 | 100SCCM | D-sub 15(VGA) | VCR |
HE | 50SCCM | D-sub 15(VGA) | Swagelok |
CF4 | 200SCCM | D-sub 15(VGA) | VCR |
SF6 | 200SCCM | D-sub 15(VGA) | VCR |
C2F6 | 200SCCM | D-sub 15(VGA) | VCR |
SiH4 | 150SCCM | D-sub 15(VGA) | VCR |
10%SiH4+90%N2 | 150SCCM | D-sub 15(VGA) | VCR |
H2 | 30SCCM | D-sub 15(VGA) | VCR |