STEC SEC-4400R
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規格介紹:
STEC SEC-4400R
規格介紹:STEC SEC-4400R
Manufacturer : STEC
Model : SEC-4400R
Category : MFC
Voltage :
詳細介紹:
| N2 | 20 SCCM |
| O2 | 20 SCCM |
| He | 20 SCCM |
| Ar | 20 SCCM |
| CH4 | 20 SCCM |
| CF4 | 50 SCCM |
| SF6 | 50 SCCM |
| BCL3 | 20 SCCM |
| SiCl4 | 20 SCCM |
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