Brooks 5850E
商品名稱:
規格介紹:
Brooks 5850E
規格介紹:Brooks 5850E
Manufacturer : Brooks
Model : 5850E
Category : MFC
Body material : Aluminum, Stainless Steel
Sealing material : Viton, EPDM
Standard : +/-1.5%FS Hi-performance:+/-1% of reading
☆ Gas and flow can be adjusted within product specifications.
☆ For second-hand or new products, please contact us for consultation.
Other Model : 5866RT / 5964C4 / GF040C / 5851E
詳細介紹:



| GAS | Flow | Connector | Fitting |
| Ar | 50SCCM | D-sub 15(VGA) | VCR |
| 100SCCM | D-sub 15(VGA) | Swagelok/VCR | |
| 200SCCM | D-sub 15(VGA) | Swagelok/VCR | |
| 300SCCM | D-sub 15(VGA) | Swagelok/VCR | |
| 1000SCCM | D-sub 15(VGA) | Swagelok | |
| 1SLM | D-sub 15(VGA) | Swagelok | |
| 2SLM | D-sub 15(VGA) | Swagelok | |
| 3SLM | D-sub 15(VGA) | Swagelok | |
| O2 | 10SCCM | D-sub 15(VGA) | Swagelok |
| 20SCCM | D-sub 15(VGA) | VCR | |
| 30SCCM | D-sub 15(VGA) | VCR | |
| 50SCCM | D-sub 15(VGA) | VCR | |
| 50SCCM | PCI-E | VCR | |
| 100SCCM | D-sub 15(VGA) | VCR | |
| 200SCCM | D-sub 15(VGA) | Swagelok/VCR | |
| 300SCCM | D-sub 15(VGA) | Swagelok/VCR | |
| N2 | 20SCCM | D-sub 15(VGA) | VCR |
| 100SCCM | D-sub 15(VGA) | Swagelok | |
| 200SCCM | D-sub 15(VGA) | VCR | |
| 4000SCCM | D-sub 15(VGA) | Swagelok | |
| 50SLM | D-sub 15(VGA) | VCR | |
| 100SLM | PCI-E | VCR | |
| BCL3 | 10SCCM | D-sub 15(VGA) | VCR |
| 50SCCM | D-sub 15(VGA) | VCR | |
| 200SCCM | D-sub 15(VGA) | VCR | |
| CL2 | 100SCCM | D-sub 15(VGA) | VCR |
| HE | 50SCCM | D-sub 15(VGA) | Swagelok |
| CF4 | 200SCCM | D-sub 15(VGA) | VCR |
| SF6 | 200SCCM | D-sub 15(VGA) | VCR |
C2F6 | 200SCCM | D-sub 15(VGA) | VCR |
| SiH4 | 150SCCM | D-sub 15(VGA) | VCR |
| 10%SiH4+90%N2 | 150SCCM | D-sub 15(VGA) | VCR |
| H2 | 30SCCM | D-sub 15(VGA) | VCR |












